Apparatus and methods for distributing gases into a processing chamber are disclosed. An objective lens holding member is held by four first metal wires on a relay holding member, and the relay holding member is held by four second metal wires on a fixing part. Additionally, an indication of an application to be displayed upon resuming operation from a power-saving mode can be received, and an image generated by the application is displayed in response to resuming operation from the power-saving mode. A gain guide is then formed in the top mirror. The support frame is at least partly formed by an assembly of at least two interconnected segments.