A motion correction and compensation method for image sensors. The locator device calculates whether a dog is tracking or on point by measuring the intensity of the movement of the dog with a vibration switch and then interpreting the intensity of movement. Abutment edges are defined to contact a peripheral edge of a memory card secured by the securing means. In order to reduce stresses in the vanes which occur during deformations of the vane carrier, one flange has on a front end portion and on a rear end portion, radially on the inside and radially on the outside, in each case a contact zone which bears against the vane carrier. For example, the system may be configured to determine multiple properties of a specimen including, but not limited to, a presence of macro defects and overlay of a specimen.