Techniques, including systems and methods, for capturing data sets include performing a client-side two-phase commit to ensure one or more data consistency conditions. A capacitor is connected by means of one connection between the at least one parallel resonator and the inductor and by means of the additional connection to the output connection. Additionally, the method includes forming a first passivation layer surrounding the first region and the second region. Thereby, previously-necessary temperature ramping of growth chambers can be reduced or eliminated leading to improvement in wafer throughput and system efficiency.