1460012138-6cff402c-80a3-4e6e-89e7-fec907dc584a

A magnetically focused scanning charged particle microscope having an array detector placed to detect scattered particles, wherein the particles fall substantially non-tangentially to the surface of the array detector. Redirecting the leakage flux limits the cross-talk and associated deleterious effects. Additional protection is also provided against passive and active wiretapper attacks, such that only an entity that has received authorization can access the system at the correct access level.