Provided are partially etched dielectric films with raised conductive features. The radiation source is to generate a beam of EUV radiation. The system includes a scanner that has a digital scanning sensor that scans the microarray and transmits from an output a digital image of the microarray, and a computer that receives the digital image of the microarray from the scanner and then processes the digital image, identifying each of the microarray’s sub-grids. In a second control, the output from the laser driver is controlled such that the density of the developed patch coincides with a reference density.