Memory elements, switching elements, and peripheral circuits to constitute a nonvolatile memory are integrally formed on a substrate by using TFTs. Advantageously, such methods provide an animal-free, synthetic, chemically defined surface that mimics a collagen coated surface for cell culture. A portion of a tip portion end surface of each side wall, except at an outer peripheral portion of the side wall and at a side of the groove portion, is caulked from an opening side of the groove portion toward a bottom side thereof, so that the vibrator is integrally coupled to the rotating shaft. The speech synthesizer front end can incorporates the supplemental phoneset as an extra feature. A shared contact plug may be formed through the inter-layer dielectric, to be in contact with the gate electrode, corner protection pattern and sourcedrain regions.