Tantalum precursors useful in depositing tantalum nitride or tantalum oxides materials on substrates, by processes such as chemical vapor deposition and atomic layer deposition. In a dicing process, separating semiconductor chips from the semiconductor wafer can be precisely achieved. The processor determines the display information based on the sensed coded data and generates and supplies the display data to the display. The audio player is also arranged on the monitor and is connected with the button. Thereby, the priority control according to the set service type is performed in the IP network.