A debris trapping system for trapping debris particles released with the generation of radiation by a radiation source in a lithographic apparatus includes first and second sets of channels. The system is based on an optical switch matrix that includes, for each input waveguide and for each output waveguide, one or more attenuators that divert an adjustable portion of the optical energy, that enters via that input waveguide, to that output waveguide. The fan housing includes an inlet shroud which is positioned over the impeller. A thermal insulator is disposed between the ICM and a heat sink outside the lateral boundary of the LAM. The receiving container is then transported away from the target station by means of the transport device. The cross-section of the tire cord is flattened and confined within an oval-shaped outer bound, the oval outer bound being characterized by a major axis and a minor axis.