Isolation structure for CMOS image sensor device chip scale packages and fabrication methods thereof. Selective CNT growth is established by coating the backside of a cantilever, having a through-hole at a tip apex, with a catalyst material followed by a cover layer. The source of liquid has an energy potential as regards movement of the gaseous bubble that is higher than the energy potential of the barrier region, the barrier region has a higher energy potential than the chamber, and the chamber has a higher energy potential than the exit region. This rotation causes ends of a movable contact of the rotor assembly to electrically disengage the stationary contacts, thereby opening the circuit.