A disk drive is disclosed comprising a head actuated over a disk, wherein data is read from the disk to generate a read signal. The airbag device includes an airbag, an inflator configured to inflate and deploy the airbag, a cover that covers the airbag, and a mounting plate. The exposed surface portion of the metal nitride layer is converted into a metal oxynitride by a surface oxidation process that employs exposure to ozonated water or an oxidant-including solution. One of the lateral walls is formed as an access wall which is opened and substantially gastightly sealed or introducing the carrier body into the interior space of the chamber. The liquid crystalline compounds are terphenyl derivatives represented by general formula : .