A furnace brazing process for metal parts of which at least one part is tubular, includes positioning of the filler metal, preferably as a pre-formed member inside said tubular part, and successive reheating inside the furnace to induce the melting of the filler metal and the accomplishment of the joint. Dielectric materials may be used to reduce conductivity between the two stacks. The rotating gantry is formed of a cylindrical portion that receives the irradiation target and supports the transport line. A thermal pattern is imprinted on the modulator by absorption of a visible or ultraviolet pattern, resulting in a corresponding modulation of the EUV beam. In one embodiment the assembled component includes a component carrier, an attachment layer disposed on the component carrier and a component disposed on the attachment layer, the component having a nano-structured first main surface facing the component carrier. The optical wedge correction element is rotated until the beam is substantially aligned to illuminate the target center.