The present invention provides a semiconductor manufacturing apparatus capable of shortening TAT by completing a plurality of processes including plating, annealing, and CMP-in-twice or the like in copper wiring process in a single manufacturing apparatus, and is also capable of suppressing costs for consumable materials by replacing the CMP step with other step. The bucket excavation controller can be adapted to control one or more digging functions of a mining excavator. The process specifically allows designing a methane-to-methanol production plant with a capacity exceeding 10000 mtpd using technically and economically feasible reforming equipment, and showing high feedstock and energy efficiency.