A semiconductor structure comprising an SRAMinverter cell and a method for forming the same are provided, wherein the SRAMinverter cell has an improved write margin. Methods for manufacturing a reticle and for manufacturing a substrate such as a silicon wafer by forming non-circular patterns on a surface using a plurality of circular or nearly-circular shaped beam shots is also disclosed. The inspection apparatus includes an irradiation part that irradiates the photovoltaic cell panel with pulsed light from a light receiving surface side and a detecting part that detects electric field intensity of a terahertz wave pulse, which is generated according to the irradiation of the pulsed light.