A system and method for producing syngas from the CO2 in a gaseous stream, such as an exhaust stream, from a power plant or industrial plant, like a cement kiln, is disclosed. The mask blank includes a reflector on a substrate. A thin-film heater 4 is disposed above the multimode optical propagating part 3 at an angle of inclination \u03b2 in relation to the direction of light propagation along a first optical waveguide 50. During operation of the flash memory device, the one or more operating parameters are retrieved from the mini array and stored in associated local latches.