An exercise device has a variable amount of energy absorbing material disposed in series between a body supporting member and an underlying floor surface. Advantageously, the write coil layers remain undamaged from the RIE in the ozone gas. Therein, one of the chips is connected to the first substrate and electrically connected to the first substrate through a via hole of the first substrate. A subtracting section subtracts the signal generated by the adaptive filter section from the noise reference signal. The first region is folded in a valley shape from a substrate at a groove, the first region and the second region are folded in a valley shape at a groove, the third region is folded in a valley shape from the substrate at a groove, and the second region and the third region are folded in a mountain shape by a line. A catalyst lowers the energy required for storing and evolving hydrogen.