Apparatus and methods are disclosed for forming plasma generated EUV light source optical elements, e. Directed flow of conditioned air is optimized by limiting the escape of air from the plenum into the space above the floor by leakage through floor openings provided for power cables, data cables and the like. Some of the cells are loaded with configuration data and produce static output signals that are used to program associated regions of programmable logic. The rectifier rectifies the AC power into direct current power. A migration plan associated with the initial workflow process model and the new workflow process model is generated. The tool can produce contours in the workpiece, or cut the workpiece, or both.