A stable solid pharmaceutical composition consisting essentially of an effective amount of a crystalline salt of formula together with an alkaline-reacting component maintaining the pH preferably above 8, or a salt with a divalent metal cation; andat least one pharmaceutical excipient;said salt of formula being essentially stable during storage at room temperature for a period of at least 3 years. Sequencing uses operational data obtained from airlines and then provides a methodology for sharing this data with the air traffic control agency. A hard mask is formed over the storage node contact and the first insulating layer is etched using the hard mask as an etch mask to form a trench in the first insulating layer.