A photoelectric apparatus has a phototransistor which receives a light signal and in which a collector current thereof varies according to intensity of the received light signal, and a transistor in which a collector current thereof varies according to a base voltage thereof. Thereafter a silicon compound layer is formed on the surface of the silicon gas by generating plasma while using a mixed gas of a second inert gas and one or more gaseous molecules, such that there is formed a silicon compound layer containing at least a pat of the elements constituting the gaseous molecules, on the surface of the silicon gas. The nozzles are formed in a row at a uniform pitch.