Provided is a dry etcher including an etching device and a cleaning device, more particularly, a dry etcher including an etching device and a cleaning device to which a cleaning process is added so as to be used in a metal layer etching process. In one embodiment, the agents are configured to aggregate the events. Moreover, the voltage supply for the radio receiver circuit is generated by a converter operating in a switched manner. A frangible seal is provided to the secondary container. The threaded ring is held by a key in the keyway on of the outer surface of the bowl or manifold. The first and second pressing elements abut against the shaft or the stator housing respectively, at the latest at the start of the pressfitting process.