The aromatic diamine compound of the present invention is represented by the following formula, and from the aromatic diamine compound a polyimide having a repeating unit represented by the following formula, which has low-temperature adherability, can be obtained. The energy beam is caused to scan, intersecting the portion for blocking the crystal growth, whereby the crystal growth can be interrupted when the application region of the energy beam intersects the portions for blocking the crystal growth. The micro resonator sensor can be manufactured without an excessive radiation loss and can be manufactured as an on-chip.