An apparatus for generating and collecting particulate matter derived from combusting a carbon-containing fuel in oxidizing gas includes a fuel burner housed in a container. The charge pump has a switching circuit coupled to an output circuit. A billing system tracks the bill for each unit in the multiple unit environment, based on the accessed digital content. The illumination subunit includes at least the EUV light source and a polarization setting device for setting a defined polarization of the EUV emission beam of the illumination subunit.