An integrated circuit comprises at least one circuit element having at least one bond site and a passivation layer. Each drive unit, however, has a speed controller of its own. In one aspect of the invention, the uPA portion of the delivery vehicle construct comprises the wild-type uPA, a fragment of uPA which has the PAI-1 binding region deleted, or a uPA peptide comprising amino acids 13\u201319 and is useful for the targeted delivery of the cargo to cells, and in particular to airway epithelia. A lifting mechanism has a first lifting element interconnected with the first scissors mechanism or the first platform for moving the first platform vertically. At least two signal traces form a broadside-coupling region in which the conductive paths of the at least two signal traces are stacked along the orientation axis and spaced apart through the thickness and extend parallel to each other for a crosstalk-reducing distance.