A valve element that can prevent particles rebounding from an exhausting pump from entering a chamber and also prevent a decrease in exhaust efficiency. Each element of a second operand of the instruction is rotated in a specified direction by a specified number of bits. The three-phase NVFF includes three control signals, for controlling an initialization phase of the slave stage, the read phase, and the write phase. A delay controller is utilized to assign a set of coefficients to the delay filter unit to perform an interpolation operation on data of the M shift registers to obtain an output value.