A table umbrella apparatus has a base, a table affixed to the base, a canopy support by the base a distance above the table, and an air treating means positioned in the base for delivering a flow of air outwardly of the base. The first foot and the second foot are configured to contact or rest on a support surface. When the amount of deposit produced in the chamber in plasma processing is larger than a predetermined amount, the amount of fluorine radicals in the chamber is increased, and when the amount of the deposit is smaller than the predetermined amount, the amount of fluorine radicals in the chamber is decreased.