A method for determining and sterilizing a load in a sterilization chamber. One of the features of the present invention is that an LDD region including a region which overlaps with a gate electrode and a region which does not overlap with the gate electrode is provided in one TFT. The first end edge and the second end edge are each formed by each edge being between 45 degrees removed from a vertical plane extending at 90 degrees to the horizontal plane formed by the side member surface. The system further includes a disc positioner operable to define a running clearance between the first disc face and the first friction surface.