A method and system for processing buffer status reports such that when BSR triggering is performed, the size of the necessary sub-header are also to be considered together in addition to the BSR size. The remote plasma excites a fluorine-containing precursor in combination with an oxygen-containing precursor. The amplifier includes a floating bias circuit that dynamically adjusts the bias state of an output driving amplifier in response to signal fluctuations of the regulator output signal.