A manufacturing method of a flash memory comprising forming a patterned first dielectric layer, forming a patterned first conductive layer and a patterned hard mask layer on a substrate. The wood chipper includes a chipping drum in a drum chamber and a discharge fan in a fan chamber. An adjacent edge of the side panel is a side panel end edge. The method further includes issuing a smart card to an person related to the prescription healthcare program, wherein the smart card has a smart card identification feature to identify the person and using the smart card to determine if the person is the authorized bearer of the smart card and is eligible for benefits from the prescription healthcare program. The stressor includes a first stressor region and a second stressor region on the first stressor region, wherein the second stressor region extends laterally closer to a channel region underlying the gate stack than the first stressor region. Because only a small section of the track is excited at a time, the efficiency is very high.