Provided is a method of patterning a catalyst using nano imprint lithography. The bottom wall layer is made up of a first layer making up an outer bottom surface of the container body and a second layer between the first layer and the frame wall, and the inspection terminals are formed so as to extend across an end face of the second layer and the outer side surface of the frame wall. In some embodiments, at least one of the thermal sensors may be secured between the temperature control layer and the dispensing chamber using a thermal adhesive. The second shaft is equipped with multiple detent positions so as thereby to position the slider exactly in the optical axis of the microscope.