Disclosed is a device for treating a semiconductor substrate. A cognitive radio communication apparatus includes a sensing reference level control unit to adaptably control a sensing reference level based on a transmission power of a secondary transmitter included in a secondary network, and a fast sensing unit to determine whether a signal received for a predetermined time period exists based on the controlled sensing reference level. The pixel values of each group are sorted in accordance with magnitude order, by a plurality of sorters. The array provides a high irradiance output beam pattern having a peak irradiance of greater than 25 Wcm2 at a work piece surface at least 1 mm away from an outer surface of a window of the reflector.