1460529474-2759d1ee-f2a6-4e84-8398-256f0e283273

An antireflection film includes alternately deposited high-refractive-index layers and low-refractive-index layers. In at least one embodiment, it includes a thin strong inner wall, a likewise thin and strong outer wall and an interior of the support tube which is of the honeycomb type or is made of foam material. Each dependency pattern defines relative dependencies for a plurality of positions in the matrix, rather than using individual dependencies for individual positions. A second series capacitive structure disposed in a second insulating trench can be employed to terminate the device.