An electrostatic chuck is provided which is arranged that, at the time of performing processing treatments of irradiating light to a to-be-processed substrate while holding the translucent to-be-processed substrate, the to-be-processed substrate can surely be held even in case the attraction force lowers due to photoelectric effect. A head structure is coupled to the other end of the delivery tube and cooling or warming fluid is directed through the tube to the head structure. The remote site 300 receives the digital symbol, determines the time stamp, generates the RF signal based on modulation of the carrier by the digital symbol at the predetermined time according to the time stamp, and broadcasts the RF signal.