A plasma treatment apparatus and a method for plasma treatment are provided that made possible to control accurately a distance between plasma and an object to be treated, and that facilitated a transportation of a substrate that a width is thin and grown in size. The interconnect has a first end with an end dimension that is larger than an end dimension of an opposite, second end of the interconnect. 0 parts by weight of inorganic or organic acids, 0. The conductive plug is recessed from a planarized top surface of the thick insulative layer. The game pieces each having one of the two colors are constructed by combinations of a plurality of solid game pieces 7 and 8 having the same shape whose front and rear can be reversed and of a plurality of hollow game pieces and 12 having the same shape whose front and rear can be reversed and which can be fitted in the solid game pieces 7 and 8 and have space for writing each graphics. In one embodiment, the invention includes a slotted gear puller which engages the web of a gear and can be used to pull the gear from the shaft based on engagement of the gear puller with the gear in the area of the web of the gear.