A micro-gyroscope having closed loop output operation by a control voltage, that is demodulated by a drive axis signal Vthx of the sense electrodes, providing Coriolis torque rebalance to prevent displacement of the micro-gyroscope on the output axis Vthy0. During a period T1 from a time point when heating of the heater is started until the resistance value of the heating unit reaches a reference value, the increasing rate is changed in multiple heating stages. The interface mechanism may received and engage the extension therewith.