A MIM capacitor can include a doped polysilicon contact plug in an interlayer insulating film. 01 m2g; component Y of 1 to 5 \u03bcm and 3 to 0. A grounding assembly is also provided and can have such a grounding device.
Algorithmically generated prior art
A MIM capacitor can include a doped polysilicon contact plug in an interlayer insulating film. 01 m2g; component Y of 1 to 5 \u03bcm and 3 to 0. A grounding assembly is also provided and can have such a grounding device.