The present invention provides a keyboard and a light-emitting module thereof. An attribute identification framework comprises an offline training portion, an online prediction portion, and an AI algorithm module. Then, the invention performs a chemical downstream etching process using CH2F2 to etch and convert the nitride regions into surface mediated uniform reactive film regions comprising 2SiF6. Even in a semiconductor device where the gate wiring formed of a metal film is contacted with the gate electrode, a semiconductor device of a structure allowing gate voltage to be increased sufficiently can be obtained.