To calibrate a lithographic apparatus having a programmable patterning means, a sensor, such as a CCD, CMOS sensor or photo-diode array, having detector elements larger than the size of a spot corresponding to a single pixel of the programmable patterning means is used. The perspective selection may be used to determine an algorithm for the predicted data of interest and to determine the relevant data for the determined algorithm to generate the predicted data. These derived parameters are then also displayed as a function of time on the display, preferably with a common time axis.