A proppant comprises a particle present in an amount of from 90 to 99. Ultrasonic sources can be used in generating the cavitation. The first and second interconnect layer insulating films include first and second low dielectric constant films, respectively. A computer-readable medium having instructions adapted to input a representative power supply waveform having noise into a simulation of an on-chip temperature sensor and estimate accuracy of the on-chip temperature sensor from the simulation is provided. The ultrasonic waves also provide and anesthetic effect for the pain and discomfort from the puncture site.