A member used within a plasma processing apparatus and exposed to a plasma of a halogen gas such as BCl3 or Cl2 is formed from a sintered body of metals of Group IIIa of Periodic Table such as Y, La, Ce, Nd and Dy, and Al andor Si, for example, 3Y2O3. The present invention is characterized in that an evaporation source holder, in which a container that encloses an evaporation material is disposed, is moved at a certain pitch with respect to a substrate during evaporation. In the present invention, a topic means a defining characteristic, usually represented as a data element, of a single feature, activity, subject, behavior, event or an aggregation of such defining characteristics.