A method for using an integrated battery and device structure includes using two or more stacked electrochemical cells integrated with each other formed overlying a surface of a substrate. The multiple magnetic layers make up a write pole which produces a first hard axis field and a first auxiliary pole that produces a first auxiliary field that opposes the first hard axis field resulting in a reduced net hard axis field. The displacement expanding plate includes a body 110 biased to rotate by the biasing unit 15, and a displacement expanding portion 120 expanding a displacement when the piezoelectric elements 17 and 18 are expanded to be displaced relative to the body in a direction perpendicular to an expanding direction of the piezoelectric elements. A computer is coupled to the sensors and configured to use the marker measurements to identify a target isocenter within the target. A method of forming a layer may include depositing the layer on a substrate in a chamber, measuring optical emission spectrum data from the chamber, calculating a thickness of the layer using the optical emission spectrum data, and ending the depositing of the layer when the calculated thickness of the layer is within a target thickness range. The second connective member includes a block fit in the cavity so that the first and second connective members cannot be rotated with respect to each other.