The present invention is a transfer mask for exposure comprising a mask portion having a plurality of cells, each of which an opening of a predetermined pattern is formed in. The interconnect uses a lightweight protocol with control characters embedded into the data stream. 0 gml or less, the particle diameter ratio of the insulating inorganic fine particles to the conductive particles is 1100 or less, and the insulating inorganic fine particles adhere to the surfaces of the conductive particles.