A charged particle beam system, a sample processing method, and a semiconductor inspection system enable an accurate detection of a particle in a film without causing LMIS contamination and allow observation with an electron microscope quickly. For example, after the first wireless switch fails, the first wireless switch transmits a restart message to its peer wireless switches to begin re-establishing peering sessions with peer wireless switches. Further, in an open state of the check valve, releasing the push member will close the coffee discharge passageway. The method creates a video from the simulated camera’s perspective of the three-dimensional simulated space.