A method for forming alignment keys on the scribe line areas of a semiconductor wafer. In general, the 3D image is transformed into a second image format that is compressed relative to the first image format, scaled to a screen size of remote node, and subsequently transferred to remote node for display. In a transistor in which a stack of oxide semiconductor layers is provided over a gate electrode layer with a gate insulating layer provided therebetween, an oxide semiconductor layer functioning as a current path of the transistor and containing an n-type impurity is sandwiched between oxide semiconductor layers having lower conductivity than the oxide semiconductor layer. During a first time section, the washing liquid passes through all of the spray devices and during a second time section, the liquid only passes through the lowermost or the uppermost spray device. Further, the content reference is resolved to retrieve and output content, including a visual representation associated with the zoom state. Via the heat exchanger arrangement, heat can be withdrawn from the process air flowing away from the drying chamber, and the process air flowing toward the heater can be fed to the heat exchanger.