According to some embodiments, a power budget allocation engine of a multi-component computer system may receive a power budget allocation adjustment request signal from a first component. In an embodiment, two polishers that absorb carbon dioxide and silicon dioxide, but which have a greater affinity for carbon dioxide, are placed in series along a conduit containing the liquid for use in an immersion lithographic apparatus. In a mouse mode, pen down events are translated to mouse data and formulated into mouse data packets which, in turn, are transmitted over the radio link to the remote host computer or server.