A ceramic membrane structure and method for separating oxygen from an oxygen containing feed at temperatures above about 600 C. A first register stores a comparison address corresponding to an optional address of the ROM-stored programs, at which an interruption-processing should be executed to virtually revise the ROM-stored programs. Beneficially the device comprises a single substrate having an n-type source, an n-type drain, a p-type source and a p-type drain formed in a surface thereof and a single area of the substrate which separates all of these regions from each other has intrinsic doping only. For each sensor, the thermally isolated membrane is formed by a process that includes a step of first depositing dielectric thin-film layers over the substrate and then performing a backside etching process on a bulk silicon with TMAH or KOH or carrying out a dry plasma etch until the bottom dielectric thin-film layer is exposed. The wringer further comprises at least one volute wherein the volute defines a semi-enclosed area inside the wringer, the semi-enclosed area configured to receive a portion of the mop through a gap defined in the volute.