The present invention relates to optical elements comprising fluorochemical surface treatments having the general structure Rf-Gmn\u2014X wherein Rf is a fluorinated alkyl group, G is a divalent linking group selected from oxygen and sulfonamido, m is an integer ranging from 0 to 1, n is an integer ranging from 1 to 24, and X is polar group or polar group containing radical. The high-frequency induction heating apparatus for quenching purpose can heat the washer by induction heating to the temperature of at least Ac1 point. The beam portion is designed to have a geometry which substantially optimizes stress across the beam portion when deflected and is adapted to be freestanding. The inclusion of oxygen vacancies into the lattice by doping the material has been found to maintain the desirable properties of MnO3, while significantly decreasing the experimentally observed overpotential.