1460671496-9b370292-4771-4427-8388-818a88076d8c

A wavelength variable interference filter includes a plurality of filter units each of which includes a pair of reflecting films facing each other and a gap changing unit changing an interval between the pair of reflecting films. Between those end frames there is a main support beam structure which may include a pair of main structural beams for example. The inspection substrate outputs inspection signals inspecting a connection between the display panel and the flexible circuit film.