1460672368-b0d3b01e-d32a-4dca-8687-c87367797d6a

A microelectromechanical systems sensor device includes a sensor portion and a sensor portion that are coupled together to form a vertically integrated configuration having a hermetically sealed chamber. The OFDM signal, which inherently has a high spectral efficiency, is used for carrying broadband data or control information. Elements 410a and 410b are formed on a surface of the solder resist layer 408. By the fact that both the receiving portion and the tab element have fastening means, a strong and stable connection is formed between the components of the fastening device.