1460675739-1e78edb8-43ab-4201-bdba-6a7e6ee420f8

Cleaning methods are disclosed for removing sidewall polymers from interconnect vias or trenches, wherein a wafer is exposed to a plasma comprising hydrogen and an inert gas in a plasma cleaning chamber following etch-stop etching. The digital information is assigned with a compression ratio or a period for retaining the information amount. The nuclear fuel assembly includes at least one clamp for longitudinally retaining a lower plug of a partial length fuel rod with respect to the base. The code-word set has a plurality of code-words, each code-word having at least one input value, and each output value has at least one corresponding code-word.