In an exposure system and semiconductor device manufacturing method relating to the present invention, an image of spatial image mark body through a reduction projection lens is projected onto a spatial image projection plate arranged on a wafer stage by irradiating the spatial image mark body arranged on a reticle stage with an exposure light. The invention also includes an apparatus effective to release pulses of electrical energy into the formation as this frequency and voltage at least until the formation has reached a point where the electrical potential arcs from one electrode to at least one other electrode. Whenever a playback event is generated for a song, a first reward and a Mood State Value based on a set of parameters are determined. A second embodiment of the invention differs from the first embodiment in that metal oxide is transported through the vessel from the first zone to the third zone and metal bromide is recycled from the third zone to the first zone. The longitudinal direction of the detection portion is located closer to one end than the other end, and a position in a vertical direction of the detection portion partially overlaps at least a toner conveying region of the second screw. The surface onto which the proteins are deposited can be modified for the purpose of constructing microarrays of biologically relevant materials or for promoting the growth of highly ordered protein crystals.