A method for processing a substrate includes generating a first laser beam, splitting the first laser beam into a plurality of second laser beams, focusing the split second laser beams on a plane in the substrate parallel to a main surface of the substrate, and performing surface separation of the substrate along the plane. The gel pads preferably comprise an intelligent gel. Accurate inductive-based position sensors continuously provide position data for the moving rotor. The emission control part instructs the electronic flash device to flash with a proper flash intensity. A shunt control circuit operates the shunt transistor between an open and closed state.